MULTI-SIZE ADAPTABLE SPIN CHUCK SYSTEM

摘要

A novel interchangeable spin chuck system is provided that allows the user to quickly change substrate sizes and spin chuck styles without any extra tools. This system has a two-piece design and overcomes many of the drawbacks of previous spin chuck designs, such as difficulty in seating the spin chuck and ensuring that the spin chuck is at a consistent flatness and height. Furthermore, this spin chuck system allows the spin chucks to be manufactured at a lower cost. Thus, rather than restricting users to “make do” with incorrect spin chucks due to budget limitations, this economical design gives users access to a wider range of spin chuck sizes and styles.

主权项

1. A spin chuck assembly comprising:
a base having upper and lower ends, said base having an opening at said lower end, said opening being configured to allow a spindle to be positioned therein; a spin chuck having upper and lower sides, said upper side being configured to support a substrate, said lower side being removably connected to said base upper end, said spin chuck not being removable from said base by a force of less than about 5 in·lbs being applied to one of said spin chuck and base.