| 摘要 |
The high-frequency voltage generator, whereby a high-frequency voltage is generated from a direct current voltage and applied to a load, comprises: a first direct current power source (11) for generating a first direct current voltage; a second direct current power source (12) for generating a second direct current voltage having a different value from the first direct current voltage; a transient alternating current voltage generation circuit (13) for generating a transient alternating current voltage having a shorter period than the high-frequency voltage period, whereof the voltage value oscillates between the first direct current voltage and the second direct current voltage; and an applied voltage switching unit (14) for switching the voltage during one high-frequency voltage period to, in the following order, the first direct current voltage, the transient alternating current voltage, the second direct current voltage, and the transient alternating current voltage. With the value of the direct current voltage applied immediately prior serving as the initial value, the applied voltage switching unit (14) switches the voltage applied to the load in a manner that causes the transient alternating current voltage to oscillate a number of times that is equal to a half-integer of 1.5 or greater. Applying the transient alternating current voltage during the switching between the first direct current voltage and the second direct current voltage allows the voltage switching to be carried out more gently than with prior art high-frequency voltage generators that use rectangular waves, thereby allowing for the suppression of noise generation and power loss. |
