发明名称 METHOD FOR ANNEALING A THIN FILM PHOTOVOLTAIC CELL DEVICE
摘要 A method of method for annealing a thin film solar cell device is described. The method includes vacuum annealing an as-deposited photovoltaic cell stack composed of a first electrode, a p-i-n junction having at least one p-doped layer, at least one n-doped layer, and at least one intrinsic layer disposed there between, and a second electrode. The vacuum annealing is performed in a non-plasma, vacuum environment by elevating a temperature of the photovoltaic cell stack to an anneal temperature within the range of between 150 degrees C. and 250 degrees C.
申请公布号 US2015340544(A1) 申请公布日期 2015.11.26
申请号 US201414286597 申请日期 2014.05.23
申请人 TEL Solar AG 发明人 Hänni Simon;Ding Laura
分类号 H01L31/18;H01L31/0368;H01L31/077 主分类号 H01L31/18
代理机构 代理人
主权项 1. A method for annealing a thin film solar cell device, comprising: after depositing a photovoltaic cell stack including a first electrode, a p-i-n junction having at least one p-doped layer, at least one n-doped layer, and at least one intrinsic layer disposed there between, and a second electrode, vacuum annealing said photovoltaic cell stack in a non-plasma, vacuum environment by elevating a temperature of said photovoltaic cell stack to an anneal temperature within the range of between 150 degrees C. and 250 degrees C.
地址 Trubbach CH