CYLINDRICAL POLYMER MASK AND METHOD OF FABRICATION

摘要

A cylindrical mask may be fabricated using a hollow casting cylinder and a mask cylinder. The casting cylinder has an inner diameter that is larger than the outer diameter of the mask cylinder. The casting and mask cylinders are coaxially assembled and a liquid polymer inserted in a space surrounding the mask cylinder between the inner surface of the casting cylinder and the outer surface of the mask cylinder. After curing the liquid polymer, the casting cylinder is removed. A surface of the cured polymer can be patterned. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.

主权项

1. A rotatable mask made by a method comprising:
an axially symmetric substrate; a compliant layer on an outer surface of the substrate; and a seamless pattern on an outer surface of the compliant layer, wherein the rotatable mask is made bya) coaxially assembling a first casting component inside of a first master mask, wherein the first master mask includes an inner diameter that is larger than an outer diameter of the first casting component, wherein an inner surface of the first master mask includes a pattern;b) depositing a first polymer precursor liquid in a space between an outer surface of the first casting component and the inner surface of the first master mask;c) curing the first polymer precursor liquid to create a first cured polymer, whereby the outer surface of the first cured polymer includes a pattern that corresponds to the pattern of the master mask;d) removing the first casting component from the first cured polymer;e) removing the first cured polymer from the first master mask;f) assembling the first cured polymer inside of a second casting component;g) coaxially assembling a second casting component inside of the first cured polymer, wherein the second casting component has an outer diameter that is smaller than an inner diameter of the first cured polymer;h) depositing a second polymer precursor liquid in a space between an outer surface of the second casting component and an inner surface of the first cured polymer;i) curing the second polymer precursor liquid to create a second cured polymer, whereby the second cured polymer and the first cured polymer together form a compliant layer for the rotatable mask.