OPTICAL DEVICE, PROJECTION OPTICAL SYSTEM, EXPOSURE DEVICE, AND METHOD OF MANUFACTURING ARTICLE

摘要

PROBLEM TO BE SOLVED: To provide an optical device that is advantageous to correct unintended deformation of a mirror due to vibration.SOLUTION: An optical device deforming a reflection surface of a mirror 1 includes: a base plate 3; a plurality of actuators 2 that are arranged between the base plate and the mirror to apply a force to the mirror; a detection part 6 that detects vibration generated to the base plate; and a control part 8 that controls the actuators on the basis of a result of the detection by the detection part so that the amount of deformation of the mirror due to the generation of vibration to the base plate falls within an allowable range.