INTERCONNECT STRUCTURE AND METHODS OF MAKING SAME

摘要

A method of manufacturing a semiconductor interconnect structure may include forming a low-k dielectric layer over a substrate and forming an opening in the low-k dielectric layer, where the opening exposes a portion of the substrate. The method may also include filling the opening with a copper alloy and forming a copper-containing layer over the copper alloy and the low-k dielectric layer. An etch rate of the copper-containing layer may be greater than an etch rate of the copper alloy. The method may additionally include patterning the copper-containing layer to form interconnect features over the low-k dielectric layer and the copper alloy.

主权项

1. A method of manufacturing a semiconductor interconnect structure, the method comprising:
forming a low-k dielectric layer over a substrate; forming an opening in the low-k dielectric layer, the opening exposing a portion of the substrate; filling the opening with a copper alloy; forming a copper-containing layer over the copper alloy and the low-k dielectric layer, wherein an etch rate of the copper-containing layer is greater than an etch rate of the copper alloy; and patterning the copper-containing layer to form interconnect features over the low-k dielectric layer and the copper alloy.