WORK FUNCTION CALIBRATION OF A NON-CONTACT VOLTAGE SENSOR

摘要

A method and a system for calibrating the work function or surface potential of a non-contact voltage sensor probe tip are provided. The method includes preparing one or more reference sample surfaces and a reference non-contact voltage sensor probe tip to have stable surface potentials, measuring the voltage between the reference samples and the reference sensor probe tip, measuring the voltage between a point on a non-reference sample surface and the reference sensor probe tip, measuring the voltage between the same point on the non-reference sample surface and a non-reference non-contact voltage sensor probe tip, and determining a surface potential correction factor for the non-reference, non-contact voltage sensor.

主权项

1. A method for calibrating the work function or surface potential of a non-contact voltage sensor probe tip, comprising:
preparing one or more reference samples and a reference noncontact voltage sensor probe tip to have stable surface potentials; establishing a controlled environment around the reference samples and reference sensor probe tip; measuring the voltage between the reference samples and the reference sensor probe tip; removing the reference sensor probe tip from the controlled environment; measuring the voltage between the reference sensor probe tip and a selected point on a non-reference sample surface using the reference noncontact voltage sensor; returning the reference sensor probe tip to the controlled environment subsequent to said measuring step; measuring again the same point on the nonreference sample surface using a nonreference noncontact voltage sensor, and determining surface potential or work function for the nonreference noncontact voltage sensor probe tip from the measured voltages.