| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical filter device that can suppress reduction in optical characteristics, an optical module, electronic equipment, and an MEMS device.SOLUTION: An optical filter device 600 includes: a wavelength-variable interference filter 5 having a pair of reflection films opposing to each other and substrates 51, 52 each having one of the pair of reflection films disposed thereon; a chassis 610 that stores the wavelength-variable interference filter 5 inside and that has a joint surface having a plane direction intersecting a substrate side face 52A along a thickness direction of the movable substrate 52; and a joining member 640 that joins the substrate side face 52A and the joint surface. |
