发明名称 |
LOW-STRESS DOPED ULTRANANOCRYSTALLINE DIAMOND |
摘要 |
Nanocrystalline diamond coatings exhibit stress in nano/micro-electro mechanical systems (MEMS). Doped nanocrystalline diamond coatings exhibit increased stress. A carbide forming metal coating reduces the in-plane stress. In addition, without any metal coating, simply growing UNCD or NCO with thickness in the range of 3-4 micron also reduces inplane stress significantly. Such coatings can be used in MEMS applications. |
申请公布号 |
WO2015179421(A1) |
申请公布日期 |
2015.11.26 |
申请号 |
WO2015US31610 |
申请日期 |
2015.05.19 |
申请人 |
UCHICAGO ARGONNE, LLC |
发明人 |
SUMANT, ANIRUDHA V.;BUJA, FEDERICO;VAN SPENGEN, WILLEM MERLIJN |
分类号 |
B32B3/00;C22C26/00;C22C49/11 |
主分类号 |
B32B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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