| 摘要 |
PURPOSE:To contrive to enhance the efficiency of washing process by a method wherein respective processing devices of HF etching, ultra washing, drying, etc., are formed in modules and are assembled, and matters to be processed are processed in the respective modules by automatic conveyance. CONSTITUTION:An automatic washer 1 is constituted of an HF etching module 2, an ultra washing module 3, and a drying module 4. The respective modules are assembled in a voluntary order. Transference of matters to be processed in the respective modules is performed automatically by chucks 19, 50, 65. Accordingly because the whole progress of process of the mattes to be processed can be performed automatically without relying on a hand, enhancement of the efficiency of process can be attained. Moreover by changing the assembling order of the respective modules, a washer having the different progress of process can be obtained. |
