发明名称 Logic chip including embedded magnetic tunnel junctions
摘要 An embodiment integrates memory, such as spin-torque transfer magnetoresistive random access memory (STT-MRAM) within a logic chip. The STT-MRAM includes a magnetic tunnel junction (MTJ) with an upper MTJ layer, lower MTJ layer, and tunnel barrier directly contacting the upper MTJ layer and the lower MTJ layer; wherein the upper MTJ layer includes an upper MTJ layer sidewall and the lower MTJ layer includes a lower MTJ sidewall horizontally offset from the upper MTJ layer. Another embodiment includes a memory area, comprising a MTJ, and a logic area located on a substrate; wherein a horizontal plane intersects the MTJ, a first Inter-Layer Dielectric (ILD) material adjacent the MTJ, and a second ILD material included in the logic area, the first and second ILD materials being unequal to one another. In an embodiment the first and second ILDs directly contact one another. Other embodiments are described herein.
申请公布号 GB2526461(A) 申请公布日期 2015.11.25
申请号 GB20150014057 申请日期 2013.03.15
申请人 INTEL CORPORATION 发明人 KEVIN J LEE;TAHIR GHANI;JOHN H EPPLE;JOSEPH M STEIGERWALD;YIH WANG
分类号 H01L27/22 主分类号 H01L27/22
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