| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an inspection apparatus which is capable of easily improving detection accuracy, and an inspection method. <P>SOLUTION: An inspection apparatus 1 comprises: a powder 12 as a coupling member (waveguide member); an elastic wave input/output unit (oscillator 13, transmitting section 14 and receiving section 15) which supplies an incident elastic wave Win to an inspection object 2 side via the powder 12 and acquires a reflection elastic wave Wref from the inspection object 2 side via the powder 12; and an impedance control unit (pressure container 11, pressure piston 17, drive section 18 and control section 19) which changes an acoustic impedance Z of the powder 12 so as to be relatively close to the acoustic impedance Z of the inspection object 2. According to a simple approach, a reflection component in the reflection elastic wave Wref on a surface S1 of the inspection object 2 is reduced and a reflection component in a cavity (defect) 21 inside the inspection object 2 can easily be detected. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
