| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electronic component measuring apparatus which is capable of measuring a microelectronic component easily and highly accurately. <P>SOLUTION: An electronic component measuring apparatus comprises a contact retainer 15 which is placed in an upper part of a pallet 2 and an electrode block 21 which is placed in an upper part of the contact retainer. In the contact retainer 15, a flexible film 18 is mounted on a lower surface of a retainer plate 17 in which a contact hole 16 is formed and a contact pin 19 is provided which is protruded from a contact seat 20 exposed on an upper surface of the flexible film 18 to a lower side of the flexible film 18 and is disposed in an upper part of an electrode of a workpiece W to be measured. In the electrode block 21, an electrode pin 22 protruded downward is attached to a block body. Electrical characteristics of the workpiece are then measured while pressing the contact seat 20 with the electrode pin 22 and depressing the contact pin 19 to an electrode pad 30 of the workpiece W. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
