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经营范围
发明名称
プラズマCVD装置
摘要
申请公布号
JP5823338(B2)
申请公布日期
2015.11.25
申请号
JP20120088992
申请日期
2012.04.10
申请人
小島プレス工業株式会社
发明人
藤井 崇之;渡邉 祐二
分类号
C23C16/50;C23C16/44;H05H1/24
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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