发明名称 |
SUSPENSION AND ABSORBER STRUCTURE FOR BOLOMETER |
摘要 |
<p>A semiconductor device includes a substrate having an upper surface that defines a sensing region. A fixed beam structure is supported at a first level above the sensing region. The fixed beam structure includes fixed beam supports that extend upwardly from the upper surface of the substrate to position the fixed beam structure at the first level above the sensing region. An absorber structure is supported above the fixed beam structure at a second level above the sensing region. The absorber structure includes a pillar support that extends upwardly from the fixed beam structure to position the absorber structure at the second level above the sensing region.</p> |
申请公布号 |
EP2946182(A2) |
申请公布日期 |
2015.11.25 |
申请号 |
EP20130870385 |
申请日期 |
2013.12.18 |
申请人 |
ROBERT BOSCH GMBH |
发明人 |
PURKL, FABIAN;YAMA, GARY;FEYH, ANDO |
分类号 |
G01J5/20;G01J5/08 |
主分类号 |
G01J5/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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