摘要 |
The invention relates to devices for high-resolution angular positioning and measurement system, including positioning devices of optical elements. Rotating movement piezoelectric actuator comprises a frame (1), equipped with a ring-shaped piezoelectric element (3) with electrodes on which upper flat surface mounted three abrasion-resistant supports (4) cooperating with the disc-shaped rotor (5), in mentioned actuator is a newly installed a disc spring (2) which outer portion of the perimeter attached to the ring-shaped piezoelectric element and its central part is rigidly fixed in the body. |