| 摘要 |
<p>In the present invention, a nitrogen-free ozone generating unit (7) integrates a plurality of functional means into a single package unit, the functional means including a nitrogen-free ozone generator (1) that is cooled to a low temperature, an ozone power source (2), a MFC (3), an APC (4), a heat insulating cooling water inlet pipe (31I), and a heat insulating cooling water outlet pipe (310). In the nitrogen-free ozone generator 1, a heat insulating layer 8 made of a heat insulating material such as an insulator is formed to cover substantially the entire surface of an ozone generator outer frame (1x). A cooling water system (30) is configured to set the temperature of cooling water (33), which is supplied to the nitrogen-free ozone generator (1) through the heat insulating cooling water inlet pipe (31I), to 5°C or less and to thereby cool the nitrogen-free ozone generator (1).</p> |
