| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of delivering a large size substrate of 2 m square or more from a mounting frame for transfer to a frame for holding a substrate, or a method of receiving the substrate from the frame for holding a substrate, and to provide a mounting frame for transfer used in these methods. <P>SOLUTION: In the mounting frame for transfer, a plurality of rotary wheels are disposed rotatably at an upper part, all contacts of the rotary wheels and a substrate being mounted are arranged to form the horizontal plane of the mounting frame, lift pins capable of ascending and descending are arranged below the horizontal plane of the mounting frame, and the outer peripheral region of the horizontal plane of the mounting frame is formed so that the mounting frame can pass through the opening of a frame for holding a substrate. A substrate is delivered to the frame for holding a substrate by lifting the frame for holding a substrate from the underside of the mounting frame for transfer while supporting the substrate with the lift pins in a state where the central region is low and both end sides are high. When the substrate is received, the lift pins waits while lowering the central region, and after the substrate is mounted on the lift pins, the lift pins are brought into planar state. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
