| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an apparatus for purifying a fluid, which can extend the length of period until a remover is broken and can reduce an exchange frequency of the removers by preventing an impurity concentration from lowering unnecessarily but by preventing the remover from being used unnecessarily, thereby reducing the cost of purifying the fluid. <P>SOLUTION: An apparatus 1 for purifying a fluid includes: a vessel 3 into which a remover 2 for removing impurities in the fluid G is filled; a supply path L1 for supplying the fluid G containing the impurities to the vessel 3; and a discharge path L2 for discharging from the vessel 3, the fluid G from which the impurities are removed by the remover 2. The apparatus further includes: a bypass route L3 for bypassing the vessel 3 from the supply path L1 to the discharge path L2; a valve V1 for adjusting a flow rate in the bypass route L3; an analyzer 4 for measuring an impurity concentration in the fluid G inside the discharge path L2; and a valve opening-controlling part 5 for controlling the valve V1 so that the impurity concentration measured by the analyzer 4 is equal to or lower than a target concentration. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
