Semiconductor device

摘要

To provide a highly reliable semiconductor device including a transistor using an oxide semiconductor. After a source electrode layer and a drain electrode layer are formed, an island-like oxide semiconductor layer is formed in a gap between these electrode layers so that a side surface of the oxide semiconductor layer is covered with a wiring, whereby light is prevented from entering the oxide semiconductor layer through the side surface. Further, a gate electrode layer is formed over the oxide semiconductor layer with a gate insulating layer interposed therebetween and impurities are introduced with the gate electrode layer used as a mask. Then, a conductive layer is provided on a side surface of the gate electrode layer in the channel length direction, whereby an Lov region is formed while maintaining a scaled-down channel length and entry of light from above into the oxide semiconductor layer is prevented.

主权项

1. A semiconductor device comprising:
a source electrode layer and a drain electrode layer; an oxide semiconductor layer comprising a first impurity region, a second impurity region, and a channel region sandwiched between the first impurity region and the second impurity region, wherein a side surface of the first impurity region is in contact with the source electrode layer in a channel-length direction and a side surface of the second impurity region is in contact with the drain electrode layer in the channel-length direction; a gate insulating layer over and in contact with the oxide semiconductor layer, the source electrode layer, and the drain electrode layer; a gate electrode layer over the gate insulating layer, wherein the gate electrode layer overlaps with the channel formation region; a conductive layer having a first portion in contact with a side surface of the gate electrode layer and a second portion in contact with an upper surface of the gate insulating layer, wherein at least part of the second portion overlaps with the source electrode layer and the drain electrode layer; a sidewall insulating layer in contact with an outer side surface of the first portion and an upper surface of the second portion, wherein the sidewall insulating layer is not in contact with the gate electrode layer; and wherein the source electrode layer has a tapered shape, wherein the drain electrode layer has a tapered shape, wherein a first edge of the oxide semiconductor layer overlap with the source electrode layer, and wherein a second edge of the oxide semiconductor layer overlap with the drain electrode layer.