Device and method for reducing a wedge error

摘要

A device for aligning a first surface of a first substrate with a second surface of a second substrate as the first and the second surfaces move toward each other across a gap. The device is comprised of:
a first retaining system for retaining the first substrate on a first retaining surface;a second retaining system for retaining the second substrate on a second retaining surface;approach means for causing the first surface to approach the second surface in one direction of translation (T) toward an end position; andmeans for reducing a wedge error between the first and second surfaces during the approach of the first surface to the second surface including an in situ measurement during the approach of the substrates.

主权项

1. A device for aligning a first surface of a first substrate with a second surface of a second substrate as the first and the second surfaces move toward each other across a gap wherein embossing structures are formed on the first surface and the second surface, said device comprising:
a first retaining system for retaining the first substrate on a first retaining surface; a second retaining system for retaining the second substrate on a second retaining surface;
a translation drive for moving the first surface toward the second surface in one direction of translation (T) toward an end position; andan active controller that reduces a wedge error between the first and second surfaces, the active controller continuously determining the wedge error as the first surface and the second surface move toward each other.