Terahertz tunable filter with microfabricated mirrors

摘要

A terahertz (THz) imaging device includes a tunable filter and a focal plane array (FPA) for receiving selected optical wavelengths of light. The tunable filter includes: (a) a first mirror comprised of a thick silicon substrate and a thin silicon membrane, in which the thin silicon membrane is separated from the thick silicon substrate by a gridded cell structure, (b) a second mirror comprised of a thick silicon substrate and a thin silicon membrane, in which the thin silicon membrane is separated from the thick silicon substrate by another gridded cell structure, and (c) a variable gap disposed between the first and second mirrors. The gridded cell structure may have a hexagonal shape, a square shape, a rectangular shape, a triangular shape or a rhombus-like shape.

主权项

1. A terahertz (THz) tunable filter comprising:
a first mirror comprised of a first thick silicon substrate and a first thin silicon membrane, wherein the first thin silicon membrane is fixed to the first thick silicon substrate by first patterned supports, and a second mirror comprised of a second thick silicon substrate and a second thin silicon membrane, wherein the second thin silicon membrane is fixed to the second thick silicon substrate by second patterned supports, wherein the first thin silicon membrane is oriented facing the second thin silicon membrane, and a variable gap is provided between the first and second thin silicon membranes.