发明名称 |
Apparatus and method for measuring three-dimensional objects |
摘要 |
There is provided a form measuring apparatus including: a projection section configured to project a plurality kinds of patterns onto a measuring object in sequence, the plurality kinds of patterns having a common repetitive structure and differing in phase; an imaging section configured to acquire an image data set by taking an image of the measuring object every time each of the plurality kinds of patterns is projected onto the measuring object; a selecting section configured to select a data set as an adequate data set from the acquired image data set, the data set concerning an identical area on the measuring object, and all data in the set falling within an effective brightness range; and a form calculating section configured to find a form of the area as a basis of acquiring the adequate data on the measuring object, based on the selected adequate data set. |
申请公布号 |
US9194697(B2) |
申请公布日期 |
2015.11.24 |
申请号 |
US201213680861 |
申请日期 |
2012.11.19 |
申请人 |
Nikon Corporation |
发明人 |
Aoki Hiroshi |
分类号 |
H04N7/18;G01B11/25;G01B11/06 |
主分类号 |
H04N7/18 |
代理机构 |
Finnegan, Henderson, Farabow, Garrett & Dunner, LLP |
代理人 |
Finnegan, Henderson, Farabow, Garrett & Dunner, LLP |
主权项 |
1. A form measuring apparatus comprising:
a projector configured to project a plurality kinds of patterns onto a measuring object in sequence, the plurality kinds of patterns having a common repetitive structure and differing in phase; an imager configured to acquire an image data set by taking an image of the measuring object at each of the plurality kinds of patterns projected onto the measuring object; a selector configured to select a data set as an adequate data set from the acquired image data sets, the data set concerning an identical area on the measuring object, and all data in the set falling within an effective brightness range over which the imager has linear input and output characteristics; and a form calculator configured to calculate a form of the area of acquiring the adequate data on the measuring object, based on the selected adequate data set. |
地址 |
Tokyo JP |