Ozone gas generator and method for manufacturing the same

摘要

A dielectric 13 is provided on each of opposing surfaces of a pair of electrodes 14. Discharge gaps 20 communicating with a raw material gas supply path and an ozone gas removal path are formed between the pair of dielectrics 13. A functional film 17 is formed on each of the pair of dielectrics 13 so as to face the discharge gaps 20. The functional film 17 contains a first metal oxide of one or more metals selected from a group consisting of niobium, tantalum, molybdenum, and chromium, and a second metal oxide of one or more metals selected from a group consisting of titanium, tungsten, zinc, and iron.

主权项

1. An ozone gas generator, comprising:
a pair of dielectrics arranged so as to oppose each other and form a discharge gap between the pair of dielectrics; at least a pair of electrodes for generating discharge in the discharge gap; a single raw material supply, the single raw material supply containing only high-purity oxygen gas to which no catalytic gas and no other types of gas are added and which has a degree of purity of equal to or higher than 99.9%; a raw material gas supply path for supplying the raw material gas from the single raw material supply to the discharge gap; an ozone gas removal path for removing ozone gas from the discharge gap; and a functional film formed on at least one of the pair of dielectrics and facing the discharge gap, wherein the functional film contains
a first metal oxide of niobium, anda second metal oxide of one or more metals selected from a group consisting of titanium, tungsten, zinc, and iron.