| 摘要 |
An ingot growing apparatus is provided. According to an exemplary embodiment of the present invention, an ingot growing apparatus comprises: a base; a main chamber including a crucible for storing a raw material and a heater for melting the raw material by heating the crucible, which is installed on the base; a dome chamber installed on the upper part of the crucible; a pull chamber installed on the upper part of the dome chamber; a support part installed on the side part of the base; a first cylinder installed on the support part for moving the main chamber; a second cylinder installed on the support part for moving the dome chamber; and a third cylinder installed on the support part for moving the pull chamber, wherein at least one among the first to third cylinders is a power cylinder. |
