发明名称 METHOD OF TREATING LONG-SIZED FILM BY USING CAN ROLL PROVIDED WITH GAS RELEASING MECHANISM
摘要 PROBLEM TO BE SOLVED: To provide a method of treating a long-sized film stably without occurrence of heave or wrinkles in the long-sized film.SOLUTION: A method of treating a long-sized film comprises conducting a surface treatment applying a thermal load, e.g. a sputtering treatment, to a long-sized film carried in a roll-to-roll manner in a state where the long-sized film is wound around the outer peripheral surface of the can roll 56. In the outer peripheral thick part of the can roll 56, a plurality of gas introduction paths 24 are arranged over the whole circumference at nearly equal intervals in the circumferential direction, and the individual gas introduction paths 24 have a plurality of gas release holes 25 opened in the outer peripheral surface of the can roll 56. The supply gas pressure in the gas introduction paths 24 is controlled based on the force under which the long-sized film wound around the outer peripheral surface of the can roll is pulled toward the central axis O of the can roll 56 through tensile force per unit area.
申请公布号 JP2015209552(A) 申请公布日期 2015.11.24
申请号 JP20140089839 申请日期 2014.04.24
申请人 SUMITOMO METAL MINING CO LTD 发明人 WATANABE HIROTO;KANDA EIZABURO
分类号 C23C14/56 主分类号 C23C14/56
代理机构 代理人
主权项
地址