| 摘要 |
PROBLEM TO BE SOLVED: To solve such a problem that when there is a region for lowering the scan speed or a region subjected to duplicated scanning in 1 frame, electrons detected per unit area increases over the amount of electrons generated in other region, and since that region looks brighter than other region, it is required to take into account of the difference in the irradiation amount of electron beam occurring the field of view of a frame, and to provide a charged particle beam device capable of generating an image in which original brightness level is kept over the entire field, even in such a case.SOLUTION: In an electron microscope generating an output image by scanning a sample with a charged particle beam more than once, and detecting the emitted electrons, an image having a uniform brightness level over the entire field of view is generated, by standardizing the brightness value in each pixel of scan region, by the irradiation time of the charged particle beam. |
