Lithographic apparatus comprising a support for holding an object, and a support for use therein

摘要

A lithographic apparatus has a support that is provided with burls for holding an object. The support has been fabricated with a lithographic manufacturing method, e.g., a MEMS-technology, so as to create burls whose orientations or positions are individually electrically controllable.

主权项

1. A lithographic apparatus comprising a support for holding an object, wherein:
the support has a first part with a first upper main surface facing the object when the support is holding the object; the support has a second part with a second upper main surface facing a first bottom main surface of the first part; the second upper main surface and the first bottom main surface are spaced apart from each other by means of multiple discrete support walls; the support has a plurality of burls extending from the first upper main surface; a first one of the plurality of burls has a first top surface operative to contact the object when the support is holding the object; a second one of the plurality of burls has a second top surface operative to contact the object when the support is holding the object; the first top surface has a first position relative to the second upper main surface and has a first orientation relative to the second main surface; the second top surface has a second position relative to the second upper main surface and has a second orientation relative to the second upper main surface; the lithographic apparatus comprises a controller that is configured to perform at least one of:
control the first position and the second position independently of one another when the support is holding the object; andcontrol the first orientation and the second orientation independently of one another when the support is holding the object.