Mask frame assembly for thin film deposition

摘要

A mask frame assembly for depositing a deposition material on a deposition substrate comprises a mask frame including an opening and frames surrounding the opening, and a mask coupled on the mask frame. A deformation prevention unit is formed on at least one region of the mask. Since the deformation prevention unit is formed on a peripheral portion of a deposition pattern in the mask, deformation of the mask in a vertical direction may be reduced. Accordingly, defective attaching of the mask to the substrate may be reduced.

主权项

1. A mask frame assembly for a thin film deposition, the mask frame assembly comprising:
a mask frame including an opening and frames surrounding the opening; and a mask coupled to the mask frame, the mask comprising: a plurality of deposition patterns which are separated from each other; and a rib disposed between immediately adjacent deposition patterns and connecting the deposition patterns to each other, the rib comprising a first half-etched portion that is recessed from a surface of the rib and does not penetrate through the mask, the first half-etched portion of the rib having a rectangular shape and being enclosed by four sidewalls and a bottom wall of the rib, a thickness of the first half-etched portion being less than a thickness of another portion of the mask.