发明名称 軟質回路用の耐応力性マイクロ・ビア構造
摘要 <p>A chip package (20) is disclosed that includes an electronic chip (10) having a plurality of die pads (14) formed on a top surface thereof, with a polyimide flex layer (22) positioned thereon by way of an adhesive layer (23). A plurality of vias (24) is formed through the polyimide flex layer (22) and the adhesive layer (23) corresponding to the die pads (14). A plurality of metal interconnects (28) are formed on the polyimide flex layer (22) each having a cover pad (31) covering a portion of a top surface (30) of the polyimide flex layer (22), a sidewall (36) extending down from the cover pad (31) and through the via (24) along a perimeter thereof, and a base (34) connected to the sidewall (36) and forming an electrical connection with a respective die pad (14). Each of the base (34) and the sidewall (36) is formed to have a thickness that is equal to or greater than a thickness of the adhesive layer (23).</p>
申请公布号 JP5820595(B2) 申请公布日期 2015.11.24
申请号 JP20110036498 申请日期 2011.02.23
申请人 发明人
分类号 H01L23/12;H01L21/60 主分类号 H01L23/12
代理机构 代理人
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