Method and apparatus for depositing copper—indium—gallium selenide (CuInGaSe2-CIGS) thin films and other materials on a substrate

摘要

An apparatus for deposition of a plurality of elements onto a solar cell substrate that comprises: a housing; a transporting apparatus to transport the substrate in and out of the housing; a first tubing apparatus to deliver powders of a first elements to the housing; a first source material tube located outside of the housing and joined to a feeder tube of the tubing apparatus; a valve located inside of the first source material tube sufficient to block access between the first source material tube and the first feeder tube; a first heating tube located inside of the housing and connected to the first feeder tube; a similar second tubing apparatus to deliver powders of a second elements to the housing; a loading station for loading the substrate onto the transporting apparatus; one or more thermal sources to heat the housing and the first and second heating tube.

主权项

1. An apparatus for deposition of a plurality of elements and/or compounds onto a solar cell substrate comprising:
a. a housing; b. a transporting apparatus to transport said substrate in and out of said housing; c. one or more tubing apparatus to deliver powders of said elements and/or compounds to said housing in a contiguous process wherein said tubing apparatus is comprised of one or more feeder tubes located outside of said housing and joined to said housing; a plurality of source material tubes located outside of said housing and joined to said feeder tubes; a plurality of valves located inside of said source material tubes sufficient to block access between said source material tubes and said feeder tubes; one or more heating tubes located inside of said housing and connected to said feeder tubes; d. a loading station for loading said substrate onto said transporting apparatus; e. one or more thermal sources to heat said housing and said heating tubes; wherein said heating tube is comprised of an upper portion and a lower portion wherein said lower portion faces said substrate and said upper portion is opposite to said lower portion wherein only said lower portion is permeable to said vapor and said carrier gas; wherein said heating tubes have a larger perimeter than said feeder tubes and encircles said feeder tubes; f. one or more sleeves wherein said sleeves have a larger perimeter than said heating tubes, encircle said heating tubes, and allow said vapor to escape from said sleeves towards the substrate.