发明名称 CUTTING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a cutting device including an inexpensive insulating base of high rigidity.SOLUTION: A cutting device comprises: a chuck table including a support surface for supporting a workpiece; a cutting means for cutting the workpiece supported by the chuck table; a cutting feed means for moving the cutting means relatively with respect to the chuck table in a cutting direction; a setup means for detecting a reference position in the cutting direction by contacting the cutting blade with a surface of the chuck table. The chuck table includes a conductive body part having a setup portion flush with the support surface and an insulating base for supporting the body part. The surface of the insulating base is insulated by ceramic coating.
申请公布号 JP2015211120(A) 申请公布日期 2015.11.24
申请号 JP20140091572 申请日期 2014.04.25
申请人 DISCO ABRASIVE SYST LTD 发明人 MATSUYAMA TOSHIFUMI;YANG YUNFENG
分类号 H01L21/301;B24B27/06 主分类号 H01L21/301
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