VACUUM PROCESSING SYSTEM, VACUUM PROCESSING DEVICE, LUBRICANT SUPPLY DEVICE, AND LUBRICANT SUPPLY METHOD

摘要

PROBLEM TO BE SOLVED: To provide a vacuum processing system and a vacuum processing device having high working efficiency, a lubricant supply device and a lubricant supply method, capable of improving the working efficiency of the vacuum processing device.SOLUTION: A transportation system is a vacuum processing system which includes: a transportation device 101 installed in the vacuum; and a lubricant supply device installed in the ambient air and supplying lubricant to the transportation device. The transportation device 101 has a lubricant circulation path which is a path of grease injected into a lubrication target portion. A lubricant supply device 1 includes: a grease server 11 which stores the lubricant in the ambient air; a lubricant supply pipe P1 which is connected to the grease server 11 and the lubricant circulation path and is a path to guide grease stored in the grease server 11 to the lubricant circulation path; and an exhaust pump 12 which evacuates the inside of the lubricant supply pipe P1.