| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method and an apparatus for growing a diamond crystal where solid conversion efficiency from a raw material gas to the crystal is enhanced. <P>SOLUTION: In the method for growing the diamond crystal that the diamond crystal is grown on a substrate 71 from the raw material gas in a reaction chamber 11 by a chemical vapor deposition method, the raw material gas is supplied into the reaction chamber 11 at a raw material gas supplying flow rate G<SB POS="POST">0</SB>satisfied with equation (1): G<SB POS="POST">0</SB>≤10×S×h (wherein, S is the area of a substrate; and h is a crystal growing rate) and exhausting from the reaction chamber 11 is performed at an exhausting flow rate G<SB POS="POST">2</SB>satisfied with equation (2): G<SB POS="POST">2</SB>≤0.90×G<SB POS="POST">0</SB>. The concentration of the raw material gas is optimized and crystallization efficiency is enhanced by using the method for growing the diamond crystal, the recovery efficiency of the raw material is enhanced by suppressing the exhausting of an unreacted raw material gas and then the solid conversion efficiency from the raw material gas to the diamond crystal can be enhanced. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
