| 发明名称 | Tablet for plasma coating system, method of manufacturing the same, and method of manufacturing a thin film using the method of manufacturing the tablet | ||
| 摘要 | A tablet for a plasma coating system having a first part that includes a first material having a first sublimation point at a first pressure and a second part that is disposed on the first part and comprises a second material having a second melting point at the first pressure, wherein the second melting point is lower than the first sublimation point. | ||
| 申请公布号 | US9196464(B2) | 申请公布日期 | 2015.11.24 |
| 申请号 | US201313968352 | 申请日期 | 2013.08.15 |
| 申请人 | Samsung Display Co., Ltd. | 发明人 | Kim Hun;Park Jin-Woo |
| 分类号 | H01L21/00;H01J37/34;C23C14/08;C23C14/30;C23C14/32;H01L51/56 | 主分类号 | H01L21/00 |
| 代理机构 | Christie, Parker & Hale, LLP | 代理人 | Christie, Parker & Hale, LLP |
| 主权项 | 1. A method of manufacturing a thin film by using a tablet for plasma coating system, wherein the tablet comprises a first part that comprises a first material having a first sublimation point at a first pressure and a second part that is disposed on the first part and comprises a second material having a second melting point at the first pressure, wherein the second melting point is lower than the first sublimation point, the method comprising: heating a crucible that accommodates the tablet; exposing an edge portion of an upper surface of the first part by the second material being melted and collected in a central portion of the upper surface of the first part; sublimating the first material from the exposed edge portion of the upper surface of the first part; and forming the thin film on a body that is to undergo deposition by the sublimated first material. | ||
| 地址 | Yongin-si KR | ||