| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a solar cell element in which a suitable membrane is formed simultaneously on both principal surfaces of a semiconductor substrate.SOLUTION: At least following steps (1), (2) are performed. (1) Arrangement step: Periphery of a semiconductor substrate 2 is electrically connected with a first electrode, and the semiconductor substrate 2 is arranged between two adjacent second electrodes, so that the interval (first distance S) of the light-receiving surface 2a of the semiconductor substrate 2 and the one second electrode becomes shorter than the interval (second distance T) of the back surface 2b of the semiconductor substrate 2 and the other second electrode. (2) Deposition step: Material gas is introduced into a deposition chamber, plasma is generated above both principal surfaces of the semiconductor substrate 2, an antireflection film is formed on the light-receiving surface 2a of the semiconductor substrate 2, and a passivation film is formed simultaneously on the back surface 2b of the semiconductor substrate 2. |
