Inspection sensitivity evaluation method

摘要

An inspection sensitivity evaluation method includes generating a reference design image where plural figure patterns are arranged, based on reference design data, generating plural position shift design images whose positional deviation amounts are mutually different such that positions of the plural figure patterns in the reference design image are uniformly shifted, acquiring an optical image of a photo mask fabricated based on the reference design data where there is no positional deviation from the plural figure patterns, calculating a first positional deviation amount between the reference design image and the optical image, calculating plural second positional deviation amounts each of which is a respective positional deviation amount between a corresponding position shift design image of the plural position shift design images and the optical image, and acquiring a detectable positional deviation amount by using the first and the plural second positional deviation amounts.

主权项

1. An inspection sensitivity evaluation method comprising:
generating a reference design image in which a plurality of figure patterns are arranged, based on reference design data in which the plurality of figure patterns are defined; generating a plurality of position shift design images whose positional deviation amounts are different from each other based on a plurality of preset positional deviation amounts in a manner such that positions of the plurality of figure patterns in the reference design image are uniformly shifted with respect to the plurality of figure patterns defined in the reference design data; acquiring an optical image of a photo mask fabricated based on the reference design data where there is no positional deviation with respect to the plurality of figure patterns; calculating a first positional deviation amount between the reference design image and the optical image; calculating a plurality of second positional deviation amounts each of which is a respective positional deviation amount between a corresponding position shift design image of the plurality of position shift design images and the optical image; and acquiring a detectable positional deviation amount by using the first positional deviation amount and the plurality of second positional deviation amounts.