Cascaded micromechanical actuator structure

摘要

A cascaded micromechanical actuator structure for rotating a micromechanical component about a rotation axis is described. The structure includes a torsion spring device which, on the one hand, is attached to a mount and to which, on the other hand, the micromechanical component is attachable. The torsion spring device has a plurality of torsion springs which run along or parallel to the rotation axis. The structure includes a rotary drive device having a plurality of rotary drives which are connected to the torsion spring device in such a way that each rotary drive contributes a fraction to an overall rotation angle of a micromechanical component about the rotation axis.

主权项

1. A cascaded micromechanical actuator structure for rotating a micromechanical component about a rotation axis, comprising:
a torsion spring device which is attached to a mount and to which the micromechanical component is attachable, the torsion spring device having a plurality of torsion springs which run one of along or parallel to the rotation axis; and a rotary drive device having a plurality of rotary drives which are connected to the torsion spring device in such a way that each of the rotary drives is suitable for contributing a fraction to a total rotation angle of the micromechanical component about the rotation, wherein the torsion spring device has a first torsion spring, a first end of the first torsion spring being attached to the mount, the rotary drive device has a first rotary drive attached between a second end of the first torsion spring and a first end of a second torsion spring, the rotary drive device has a second rotary drive attached between a second end of a second torsion spring and the micromechanical component so that the torsion spring device and the rotary drive device are provided between the mount and the micromechanical component, the first rotary drive has a first rotatable comb electrode system and a first stationary comb electrode system cooperating therewith, and the second rotary drive has a second rotatable comb electrode system and a second stationary comb electrode system cooperating therewith.