Method of manufacturing retainer ring for polishing wafer

摘要

Provided are a retainer ring for polishing a wafer and a method of manufacturing the retainer ring, in which an outer circumferential surface of the wafer is retained during an operation of polishing a wafer by using a chemical mechanical polishing (CMP) method.;In detail, a retainer ring may be manufactured at relatively low costs.;In addition, a method of manufacturing a retainer ring for polishing a wafer, which may be produced at relatively low costs, may be provided.

主权项

1. A method of manufacturing a retainer ring for polishing a wafer, the retainer ring being installed on a carrier that closely contacts the wafer to a top surface of a polishing pad to retain the wafer, the method comprising:
(a) preparing a frame ring that is in the form of a circular ring, formed of a metal, and mounted to the carrier, wherein a plurality of coupling holes are formed in the frame ring; (b) after completing (a), screw-coupling a plurality of coupling members to the plurality of coupling holes of the frame ring such that an end portion of the plurality of coupling members, in which a male screw portion is formed, is exposed below the frame ring; (c) injection-molding a plurality of retaining members that are each in the form of an arc dividing a circumference of a circle corresponding to the frame ring and include a plurality of coupling grooves corresponding to the plurality of coupling holes of the frame ring, at corresponding positions; (d) after completing (a), (b), and (c), temporarily coupling the frame ring and the plurality of retaining members by inserting the end portion of the plurality of coupling members exposed below the frame ring, into the plurality of coupling grooves of the retaining members; (e) placing a coupled structure of the frame ring and the plurality of retaining members obtained after completing (d), in an injection mold; and (f) after performing (e), forming an intermediate member that couples the frame ring and the retaining members by using an insert injection method in which a melting resin is injected between the frame ring and the retaining members.