摘要 |
PROBLEM TO BE SOLVED: To provide a reflection type phase difference plate having high degree of freedom of design in element arrangement and capable of reducing thermal lens effect, and to provide a laser beam machine using the reflection type phase difference plate.SOLUTION: In a reflection type phase difference plate 1, a periodic lattice 3 is formed on a surface of conductor material 2, and relation of P/λ<1 is satisfied when wavelength of incident light is set to λ and a pitch of the periodic lattice is set to P. |