发明名称 Method for providing a magnetic recording transducer using a chemical buffer
摘要 A method for fabricating a magnetic recording transducer is described. The magnetic recording transducer has an underlayer and at least one layer on the underlayer. The layer(s) are capable of including an aperture that exposes a portion of the underlayer. The method includes providing a neutralized aqueous solution having a chemical buffer therein. The chemical buffer forms a nonionic full film corrosion inhibitor. The method also includes exposing a portion of the magnetic recording transducer including the layer(s) to the neutralized aqueous solution including the chemical buffer. In one aspect this exposure occurs through a chemical mechanical planarization.
申请公布号 US9196283(B1) 申请公布日期 2015.11.24
申请号 US201313801408 申请日期 2013.03.13
申请人 Western Digital (Fremont), LLC 发明人 Osugi Masahiro;Yao Lily;Jiang Ming;Luo Guanghong;Kan Wai-Ming J.
分类号 G11B5/127;H04R31/00;G11B5/84 主分类号 G11B5/127
代理机构 代理人
主权项 1. A method for fabricating a magnetic recording transducer having an underlayer, at least one layer on the underlayer, and a structure under the underlayer, the at least one layer capable of including an aperture that exposes a portion of the underlayer, the method comprising: providing a neutralized aqueous solution having a chemical buffer therein, the chemical buffer for forming a nonionic full film corrosion inhibitor that inhibits removal of the portion of the underlayer exposed by the aperture by forming the nonionic full film corrosion inhibitor on at least the aperture; and exposing a portion of the magnetic recording transducer including the at least one layer to the neutralized aqueous solution including the chemical buffer, corrosion of the structure being inhibited by inhibition of removal of the portion of the underlayer by the nonionic full film corrosion inhibitor.
地址 Fremont CA US