State-based adjustment of power and frequency

摘要

Systems and methods for state-based adjustment of power and frequency are described. A primary generator of a system includes a primary power supply for supplying a primary radio frequency (RF) signal to an electrode. The primary generator further includes an automatic frequency control (AFC) to provide a first frequency input to the primary power supply when a pulsed signal is in a first state. A secondary generator of the system includes a secondary power supply for supplying a secondary RF signal to the electrode. The secondary generator also includes an AFC to provide a second frequency input to the secondary power supply when the pulsed signal is in the first state. The secondary generator includes an AFC to provide a third frequency input to the secondary power supply when the pulsed signal is in a second state. The system includes a digital pulsing source for generating the pulsed signal.

主权项

1. A system comprising:
a digital pulsing source for generating a pulsed signal; a primary generator including:
a primary power supply coupled to an electrode for supplying a primary radio frequency (RF) signal to the electrode;a primary processor coupled to the digital pulsing source for receiving the pulsed signal, the primary processor for identifying a first one of two states of the pulsed signal and a second one of the two states;a first primary power controller coupled to the primary processor to provide a first primary power value to the primary power supply when the pulsed signal is in the first state;a second primary power controller coupled to the primary processor to provide a second primary power value to the primary power supply when the pulsed signal is in the second state;a first primary automatic frequency control (AFC) coupled to the primary processor to receive the state identification from the primary processor, the first primary AFC configured to provide a first primary frequency input to the primary RF signal when the pulsed signal is in the first state; anda second primary AFC coupled to the primary processor to receive the state identification from the primary processor, the second primary AFC configured to provide a second primary frequency input to the primary RF signal when the pulsed signal is in the second state; a secondary generator including:
a secondary power supply coupled to the electrode for supplying a secondary RF signal to the electrode;a secondary processor coupled to the digital pulsing source for receiving the pulsed signal to identify whether the pulsed signal is in the first state or the second state;a first secondary power controller coupled to the secondary processor to provide a first secondary power value to the secondary power supply when the pulsed signal is in the first state;a second secondary power controller coupled to the secondary processor to provide a second secondary power value to the secondary power supply when the pulsed signal is in the second state;a first secondary AFC coupled to the secondary processor to receive the state identification from the secondary processor, the first secondary AFC configured to provide a first secondary frequency input to the secondary RF signal when the pulsed signal is in the first state; anda second secondary AFC coupled to the secondary processor to receive the state identification from the secondary processor, the second secondary AFC configured to provide a second secondary frequency input to the secondary RF signal when the pulsed signal is in the second state.