发明名称 Method and device for heating a layer of a plate by priming and light flow
摘要 The invention relates to a method and to a device for at least locally heating a plate including at least one layer (2) to be at least locally heated by at least one main, light flow pulse, and including at least one priming region (4) located deeply relative to the front surface of said layer to be heated, wherein the main flow (7) is capable of heating said layer to be heated (2) while the temperature of the latter is within a high temperature range (PHT), and a priming a secondary heating means (9) capable of heating said priming region from a temperature within a low temperature range (PBT) up to a temperature within said high temperature range (PHT).
申请公布号 US9196490(B2) 申请公布日期 2015.11.24
申请号 US200913127468 申请日期 2009.10.27
申请人 S.O.I. TEC SILICON ON INSULATOR TECHNOLOGIES 发明人 Bruel Michel
分类号 F27D11/12;H01L21/268;H01L21/22 主分类号 F27D11/12
代理机构 Blakely Sokoloff Taylor & Zafman LLP 代理人 Blakely Sokoloff Taylor & Zafman LLP
主权项 1. A method for at least locally heating a plate including at least one layer to be at least locally heated by at least one main light flow pulse, the method comprising the following steps: heating a priming region of said plate located behind or under a front surface of the at least one layer to be locally heated, at least partially by a priming secondary heating flow, wherein said priming region heats through thermal diffusion a portion of the layer to be heated adjacent to said priming region up to a temperature within a predetermined temperature range sufficient to make said portion highly absorbent of said main light flow; applying the main light flow to the plate, at least locally, through the front surface of said layer to be heated, wherein the wavelength of said main light flow is chosen such that the coefficient of absorption of this flow by the material of the layer to be heated is at a first level while the temperature of the layer to be heated is in a temperature range lower than the predetermined temperature range, the absorption coefficient of this flow by the material of the layer to be heated increases relative to said first level with temperature as the temperature of the layer to be heated passes into the predetermined temperature range, and the main light flow is, on its own, incapable of heating directly the material of the layer to be heated up to the predetermined temperature range, and generating an absorbent thermal front, wherein said absorbent thermal front progresses towards the front surface under the combined effect of a thermal diffusion towards a front of the thermal front and an input of thermal energy by said main light flow which reaches the thermal front as soon as the temperature of the thermal front passes into said predetermined temperature range.
地址 Chemin des Franques FR