PDMS imprinting stamp with embedded flexure

摘要

A non-deformable patterned template includes a stable mesh, wherein the stable mesh is resistant to deformation; a polymer sheet with the stable mesh embedded therein, wherein the polymer sheet is formed using a liquid polymer adapted to receive the stable mesh, and wherein the liquid polymer is cured after the stable mesh has been placed within the liquid polymer; and a surface pattern on at least one face of the polymer sheet.

主权项

1. A system for imprinting comprising:
a polymer stamp having a surface pattern and an imbedded mesh, wherein the mesh is resistant to deformation in the x-direction and y-direction and flexible in the z-direction; a means for applying a force to the polymer stamp wherein the force deforms the stamp and brings a portion of the stamp in contact with a surface to be stamped; wherein increasing the force brings the entire surface pattern in contact with the surface to be stamped; wherein a pattern of openings causes the mesh to function as a flexure; and wherein the pattern of openings are concentric arc sections.