| 摘要 |
PROBLEM TO BE SOLVED: To provide a break method and a break device, capable of efficiently breaking a substrate mounted on a table, with low load along planned segmentation lines crossing each other, without moving and reversing along a scribe line, to produce unit products.SOLUTION: The substrate W is mounted on the absorption table 1 on which convex parts 1b corresponding to the scribe planned lines S1 and S2 of a grid form which crosses each other, and it is absorbed by the absorption table 1. Thereby, a part contacted to the convex part 1b of the substrate W is made inflected upheaval, and scribe of an apex surface of the inflected upheaval part 14 is performed by a scribe line forming member 11, to form scribe line on the substrate W. At the same time, crack of the scribe line is penetrated in a substrate thickness direction by tension stress produced in the inflected upheaval part 14 of the substrate W, to completely segment the substrate W along the scribe line, and unit products W1 segmented in a grid form is produced. |
