Pattern formation method

摘要

A pattern formation method includes a first step of forming a film having a flat surface on an uneven structure including a concave portion exhibiting liquid repellency and a convex portion exhibiting lyophilic properties so as to cover the concave portion and the convex portion; and a second step of forming a pattern by drying the film.

主权项

1. A pattern formation method, comprising:
a first step of forming a film having a flat surface on an uneven structure including a concave portion exhibiting liquid repellency and a convex portion exhibiting lyophilic properties so as to cover the concave portion and the convex portion; and a second step of forming a pattern by drying the film, wherein the film is formed with a coating liquid that satisfies:
σ>0.153p1.947×δ−3.84×|aH|1.022 where surface tension is denoted by σ (N/m); film thickness is denoted by δ (m); pitch of irregularities made up of the concave portion exhibiting liquid repellency and the convex portion exhibiting lyophilic properties is denoted by p (m); and Hamaker constant is denoted by aH (J).