MEMS fluid pump with integrated pressure sensor for dysfunction detection

摘要

The invention concerns a pumping device that includes a pump having a pumping chamber with a variable volume, an inlet that communicates with the pumping chamber and a valve, an outlet that communicates with the pumping chamber and a valve, and an actuator adapted to change the volume of the pumping chamber. A fluidic pathway in the pumping device includes the inlet, the pumping chamber, the outlet, and a downstream line situated downstream of the outlet valve. The pumping device also includes a pressure sensor for measuring the pressure between the valves of the pathway, and a processing means for processing the received pressure data from the pressure sensor. The invention also concerns a method for detecting a dysfunction in the pumping device.

主权项

1. A pumping device comprising
a pump having a pumping chamber having a variable volume, an inlet communicating with the pumping chamber and comprising an inlet valve, an outlet communicating with the pumping chamber and comprising an outlet valve, an actuator adapted to change the volume of the pumping chamber, wherein the actuator performs two half actuations separated by a full actuation and also by another period of time, a fluidic pathway comprising said inlet, said pumping chamber, said outlet, and a downstream line situated downstream of the outlet valve, a pressure sensor for measuring pressure between the inlet valve and the outlet valve of said pathway, a processor to analyze received pressure data from the pressure sensor, wherein said processor analyzes a profile of said pressure at each stroke of the pump.