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发明名称
成膜装置内之金属膜之乾式清洁方法
摘要
申请公布号
TWI509064
申请公布日期
2015.11.21
申请号
TW102109528
申请日期
2013.03.18
申请人
中央硝子股份有限公司
发明人
梅崎智典;武田雄太;毛利勇
分类号
C11D7/28;C11D7/04;H01L21/306
主分类号
C11D7/28
代理机构
代理人
陈长文 台北市松山区敦化北路201号7楼
主权项
一种乾式清洁方法，其系使用β-二酮除去附着于成膜装置之金属膜者，其特征在于：将包含β-二酮及NOx(表示NO、N2O中之至少1者)之气体用作清洁气体，并使该清洁气体与200℃~400℃之温度范围内之该金属膜反应，藉此除去该金属膜。
地址
日本
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