| 发明名称 |
PRODUCTION OF POROUS SILICON WITH STABLE PHOTO LUMINESCENCE |
| 摘要 |
FIELD: physics.SUBSTANCE: in compliance with this invention, porous silicon with stable photo luminescence is produced by anode electrochemical etching of monocrystalline silicon substrate in electrolyte. This electrolyte consists of hydrofluoric acid, ethanol and water solution of potassium permanganate at illumination of substrate and in darkness.EFFECT: production of porous silicon films with stable spectra of photo luminescence. |
| 申请公布号 |
RU2568954(C1) |
申请公布日期 |
2015.11.20 |
| 申请号 |
RU20140122726 |
申请日期 |
2014.06.03 |
| 申请人 |
FEDERAL'NOE GOSUDARSTVENNOE BJUDZHETNOE UCHREZHDENIE NAUKI FIZICHESKIJ INSTITUT IM. P.N. LEBEDEVA ROSSIJSKOJ AKADEMII NAUK (FIAN) |
发明人 |
MEL'NIK NIKOLAJ NIKOLAEVICH;TREGULOV VADIM VIKTOROVICH |
| 分类号 |
H01L33/02;B82B3/00 |
主分类号 |
H01L33/02 |
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