发明名称 |
ROLL TO ROLL EXPOSURE DEVICE |
摘要 |
The present invention relates to a light exposure device. The light exposure device comprises: a mask support equipped with a mask which includes a plurality of first align marks facing each other; a plurality of camera units facing the first align marks one to one, and positioning the mask on a reference position by picking up images of the first align marks; a winding unit for winding a film which includes a plurality of second align marks facing each other so as to align an align mark located in a first position among the second align marks in a camera unit located in the first position among the camera units; and an unwinding unit winding the film while the winding unit winds the film so as to align an align mark located in a second position among the second align marks in a camera unit located in the second position among the camera units. |
申请公布号 |
KR20150129367(A) |
申请公布日期 |
2015.11.20 |
申请号 |
KR20140056235 |
申请日期 |
2014.05.12 |
申请人 |
OPTIRAY. CO. KR |
发明人 |
KIM, SEONG BONG;CHO, WON YOUNG |
分类号 |
G03F9/00;G03F7/20;H01L21/027 |
主分类号 |
G03F9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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