发明名称 ROLL TO ROLL EXPOSURE DEVICE
摘要 The present invention relates to a light exposure device. The light exposure device comprises: a mask support equipped with a mask which includes a plurality of first align marks facing each other; a plurality of camera units facing the first align marks one to one, and positioning the mask on a reference position by picking up images of the first align marks; a winding unit for winding a film which includes a plurality of second align marks facing each other so as to align an align mark located in a first position among the second align marks in a camera unit located in the first position among the camera units; and an unwinding unit winding the film while the winding unit winds the film so as to align an align mark located in a second position among the second align marks in a camera unit located in the second position among the camera units.
申请公布号 KR20150129367(A) 申请公布日期 2015.11.20
申请号 KR20140056235 申请日期 2014.05.12
申请人 OPTIRAY. CO. KR 发明人 KIM, SEONG BONG;CHO, WON YOUNG
分类号 G03F9/00;G03F7/20;H01L21/027 主分类号 G03F9/00
代理机构 代理人
主权项
地址